Improved retention of phosphorus donors in germanium using a non-amorphizing fluorine co-implantation technique (2018)

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1063/1.4999210

Publication URI: http://dx.doi.org/10.1063/1.4999210

Type: Journal Article/Review

Parent Publication: Journal of Applied Physics

Issue: 16