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Deposition of lanthanum zirconium oxide high-? films by liquid injection atomic layer deposition (2007)

First Author: Gaskell J

Attributed to: Liquid injection ALD of Cp- based precursors for deposition of dielectric materials funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1063/1.2784956

Publication URI: http://dx.doi.org/10.1063/1.2784956

Type: Journal Article/Review

Parent Publication: Applied Physics Letters

Issue: 11

ISSN: 0003-6951