📣 Help Shape the Future of UKRI's Gateway to Research (GtR)

We're improving UKRI's Gateway to Research and are seeking your input! If you would be interested in being interviewed about the improvements we're making and to have your say about how we can make GtR more user-friendly, impactful, and effective for the Research and Innovation community, please email gateway@ukri.org.

Liquid injection MOCVD and ALD of ZrO2 using Zr-cyclopentadienyl precursors (2007)

First Author: Gaskell J

Attributed to: Liquid injection ALD of Cp- based precursors for deposition of dielectric materials funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.surfcoat.2007.04.098

Publication URI: http://dx.doi.org/10.1016/j.surfcoat.2007.04.098

Type: Journal Article/Review

Parent Publication: Surface and Coatings Technology

Issue: 22-23