GaN surface sputter damage investigated using deep level transient spectroscopy (2021)

Abstract

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Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.mssp.2020.105654

Publication URI: http://dx.doi.org/10.1016/j.mssp.2020.105654

Type: Journal Article/Review

Parent Publication: Materials Science in Semiconductor Processing