Hot-wire CVD hydrogenated amorphous silicon for multi-layer photonic applications (2020)

First Author: Chong H
Attributed to:  Laser-Engineered Silicon: Manufacturing Low Cost Photonic Systems funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1117/12.2546282

Publication URI: http://dx.doi.org/10.1117/12.2546282

Type: Conference/Paper/Proceeding/Abstract