Automated Nanoscale Absolute Accuracy Alignment System for Transfer Printing. (2020)

First Author: McPhillimy J
Attributed to:  Parallel Heterogeneous Integration of III-V Devices on Silicon Photonic Chips funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1021/acsanm.0c02224

PubMed Identifier: 33134883

Publication URI: http://europepmc.org/abstract/MED/33134883

Type: Journal Article/Review

Volume: 3

Parent Publication: ACS applied nano materials

Issue: 10

ISSN: 2574-0970