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Closed-Loop Characterization of Noise and Stability in a Mode-Localized Resonant MEMS Sensor. (2019)

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1109/tuffc.2018.2878241

PubMed Identifier: 30371360

Publication URI: http://europepmc.org/abstract/MED/30371360

Type: Journal Article/Review

Volume: 66

Parent Publication: IEEE transactions on ultrasonics, ferroelectrics, and frequency control

Issue: 1

ISSN: 0885-3010