Impact of Inductively Coupled Plasma Etching Conditions on the Formation of Semi-Polar ( 11 2 ¯ 2 ) and Non-Polar ( 11 2 ¯ 0 ) GaN Nanorods. (2020)
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.3390/nano10122562
PubMed Identifier: 33419314
Publication URI: http://europepmc.org/abstract/MED/33419314
Type: Journal Article/Review
Volume: 10
Parent Publication: Nanomaterials (Basel, Switzerland)
Issue: 12
ISSN: 2079-4991