Impact of Inductively Coupled Plasma Etching Conditions on the Formation of Semi-Polar ( 11 2 ¯ 2 ) and Non-Polar ( 11 2 ¯ 0 ) GaN Nanorods. (2020)

First Author: Coulon PM

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.3390/nano10122562

PubMed Identifier: 33419314

Publication URI: http://europepmc.org/abstract/MED/33419314

Type: Journal Article/Review

Volume: 10

Parent Publication: Nanomaterials (Basel, Switzerland)

Issue: 12

ISSN: 2079-4991