High-accuracy simultaneous measurement of surface profile and film thickness using line-field white-light dispersive interferometer (2021)

First Author: Guo T

Attributed to: Future Advanced Metrology Hub funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.optlaseng.2020.106388

Publication URI: http://dx.doi.org/10.1016/j.optlaseng.2020.106388

Type: Journal Article/Review

Parent Publication: Optics and Lasers in Engineering