A Resonant MEMS Accelerometer With 56ng Bias Stability and 98ng/Hz 1/2 Noise Floor (2019)

First Author: Zhao C
Attributed to:  CSIC Innovation and Knowledge Centre Phase 2 funded by EPSRC


No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1109/jmems.2019.2908931

Publication URI: http://dx.doi.org/10.1109/jmems.2019.2908931

Type: Journal Article/Review

Parent Publication: Journal of Microelectromechanical Systems

Issue: 3