A High Resolution Differential Mode-Localized MEMS Accelerometer (2019)
Attributed to:
CSIC Innovation and Knowledge Centre Phase 2
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1109/jmems.2019.2926651
Publication URI: http://dx.doi.org/10.1109/jmems.2019.2926651
Type: Journal Article/Review
Parent Publication: Journal of Microelectromechanical Systems
Issue: 5