Mass Tuning in Weakly Coupled Low-Q Piezoelectric MEMS Resonator Arrays for Particulate Sensing (2020)
Attributed to:
CSIC Innovation and Knowledge Centre Phase 2
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1109/mems46641.2020.9056426
Publication URI: http://dx.doi.org/10.1109/mems46641.2020.9056426
Type: Conference/Paper/Proceeding/Abstract