📣 Try out the NEW Gateway to Research and let us know what you think.

We're looking for users to test the new service during August and September and share their feedback. Express your interest by completing this short form.

A Resonant MEMS Accelerometer With 56ng Bias Stability and 98ng/Hz 1/2 Noise Floor (2019)

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1109/jmems.2019.2908931

Publication URI: http://dx.doi.org/10.1109/jmems.2019.2908931

Type: Journal Article/Review

Parent Publication: Journal of Microelectromechanical Systems

Issue: 3