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Mass Tuning in Weakly Coupled Low-Q Piezoelectric MEMS Resonator Arrays for Particulate Sensing (2020)

First Author: Chellasivalingam M

Attributed to: Innovation and Knowledge Centre for Smart Infrastructure and Construction - Collaborative Programme Tranche 2 funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1109/mems46641.2020.9056426

Publication URI: http://dx.doi.org/10.1109/mems46641.2020.9056426

Type: Conference/Paper/Proceeding/Abstract