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Thick film hydrogen silsesquioxane planarization for passive component technology associated with electronic-photonic integrated circuits (2019)

First Author: Al-Moathin A

Attributed to: Optically controlled THz phased array antennas funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1116/1.5123286

Publication URI: http://dx.doi.org/10.1116/1.5123286

Type: Journal Article/Review

Parent Publication: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Issue: 6