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Polarization-sensitive transfer matrix modeling for displacement measuring interferometry. (2020)

First Author: Bridges A

Attributed to: Optical metrology to support the next generation of nanopositioning funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1364/ao.396922

PubMed Identifier: 32902471

Publication URI: http://europepmc.org/abstract/MED/32902471

Type: Journal Article/Review

Volume: 59

Parent Publication: Applied optics

Issue: 25

ISSN: 1559-128X