Lateral Extensions to Nanowires for Controlling Nickel Silicidation Kinetics: Improving Contact Uniformity of Nanoelectronic Devices (2021)

First Author: Simon M

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1021/acsanm.0c03072

Publication URI: http://dx.doi.org/10.1021/acsanm.0c03072

Type: Journal Article/Review

Parent Publication: ACS Applied Nano Materials

Issue: 5