A study of the formation of isotopically pure 28 Si layers for quantum computers using conventional ion implantation (2021)

First Author: Schneider E
Attributed to:  Quantum technology capital: Multi-species single-ion implantation funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/1361-6463/ac0a07

Publication URI: http://dx.doi.org/10.1088/1361-6463/ac0a07

Type: Journal Article/Review

Parent Publication: Journal of Physics D: Applied Physics

Issue: 35