Experimental Observation of Temperature and Pressure Induced Frequency Fluctuations in Silicon MEMS Resonators (2021)
Attributed to:
Improving reservoir management
funded by
NERC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1109/jmems.2021.3077633
Publication URI: http://dx.doi.org/10.1109/jmems.2021.3077633
Type: Journal Article/Review
Parent Publication: Journal of Microelectromechanical Systems
Issue: 4