Simultaneous microscopic imaging of thickness and refractive index of thin layers by heterodyne interferometric reflectometry (HiRef) (2021)

First Author: Nahmad-Rohen A

Attributed to: Cardiff University Experimental Equipment funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/1361-6463/ac22d4

Publication URI: http://dx.doi.org/10.1088/1361-6463/ac22d4

Type: Journal Article/Review

Parent Publication: Journal of Physics D: Applied Physics

Issue: 5