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Sensitivity enhancement using chemically reactive gas cluster ion beams in secondary ion mass spectrometry (SIMS) (2022)

First Author: Lagator M

Attributed to: New Developments in Quantitative 3D Chemical Imaging funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1002/sia.7054

Publication URI: http://dx.doi.org/10.1002/sia.7054

Type: Journal Article/Review

Parent Publication: Surface and Interface Analysis

Issue: 4