Flexible Tactile Sensors Using AlN and MOSFETs Based Ultra-Thin Chips (2023)
Abstract
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Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1109/jsen.2022.3140651
Publication URI: http://dx.doi.org/10.1109/jsen.2022.3140651
Type: Journal Article/Review
Parent Publication: IEEE Sensors Journal
Issue: 20