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Surface measuring coherence scanning interferometry beyond the specular reflection limit (2021)

First Author: Thomas M

Attributed to: Metrology for precision and additive manufacturing funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1364/oe.435715

PubMed Identifier: 34809031

Publication URI: http://europepmc.org/abstract/MED/34809031

Type: Journal Article/Review

Parent Publication: Optics Express

Issue: 22

ISSN: 1094-4087