Surface measuring coherence scanning interferometry beyond the specular reflection limit. (2021)

First Author: Thomas M
Attributed to:  Metrology for precision and additive manufacturing funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1364/oe.435715

PubMed Identifier: 34809031

Publication URI: http://europepmc.org/abstract/MED/34809031

Type: Journal Article/Review

Volume: 29

Parent Publication: Optics express

Issue: 22

ISSN: 1094-4087