Argon cluster-ion sputter yield: Molecular dynamics simulations on silicon and equation for estimating total sputter yield (2021)

First Author: Cumpson P

Attributed to: University of Newcastle - Equipment Account funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1002/sia.6996

Publication URI: http://dx.doi.org/10.1002/sia.6996

Type: Journal Article/Review

Parent Publication: Surface and Interface Analysis

Issue: 4