Scanning Probe Lithography: State-of-the-Art and Future Perspectives. (2022)
Attributed to:
A hybrid precision manufacturing platform for next-generation of nanoscale products
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.3390/mi13020228
PubMed Identifier: 35208352
Publication URI: http://europepmc.org/abstract/MED/35208352
Type: Journal Article/Review
Volume: 13
Parent Publication: Micromachines
Issue: 2
ISSN: 2072-666X