Miniaturized thermal acoustic gas sensor based on a CMOS microhotplate and MEMS microphone. (2022)
Attributed to:
New Industrial Systems: Optimising Me Manufacturing Systems
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1038/s41598-022-05613-0
PubMed Identifier: 35105901
Publication URI: http://europepmc.org/abstract/MED/35105901
Type: Journal Article/Review
Volume: 12
Parent Publication: Scientific reports
Issue: 1
ISSN: 2045-2322