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Realization of a Graphene/PMMA Acoustic Capacitive Sensor Released by Silicon Dioxide Sacrificial Layer. (2021)

First Author: Xu J

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1021/acsami.1c05424

PubMed Identifier: 34337933

Publication URI: http://europepmc.org/abstract/MED/34337933

Type: Journal Article/Review

Volume: 13

Parent Publication: ACS applied materials & interfaces

Issue: 32

ISSN: 1944-8244