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Laser ultrasonic characterization of membranes for use as micro-electronic mechanical systems (MEMS) (2017)

First Author: Edwards R.S.

Attributed to: Creating Silicon Based Platforms for New Technologies funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1063/1.4974607

Publication URI: http://dx.doi.org/10.1063/1.4974607

Type: Other

Volume: 1806

Parent Publication: AIP Conference Proceedings

ISSN: 15517616 0094243X