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OPTIMIZING REMOTE PLASMA SOURCES FOR SELECTIVE ETCHING (2016)

First Author: Shuo Huang

Attributed to: UCL Astrophysics Consolidated Grant 2012-2015 funded by STFC

Abstract

No abstract provided

Bibliographic Information

Type: Conference/Paper/Proceeding/Abstract

Parent Publication: 2016 43RD IEEE INTERNATIONAL CONFERENCE ON PLASMA SCIENCE (ICOPS)