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Atomic insights into the oxygen incorporation in atomic layer deposited conductive nitrides and its mitigation by energetic ions. (2021)

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1039/d0nr08921d

PubMed Identifier: 34052842

Publication URI: http://europepmc.org/abstract/MED/34052842

Type: Journal Article/Review

Volume: 13

Parent Publication: Nanoscale

Issue: 22

ISSN: 2040-3364