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Silicon MEMS Gyroscope with Quatrefoil Suspension System Achieving 1 Million Quality Factor (2022)

First Author: Parajuli M

Attributed to: UKCRIC - (National Research Facility for Infrastructure Sensing) funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1109/mems51670.2022.9699510

Publication URI: http://dx.doi.org/10.1109/mems51670.2022.9699510

Type: Conference/Paper/Proceeding/Abstract