Silicon MEMS Gyroscope with Quatrefoil Suspension System Achieving 1 Million Quality Factor (2022)

First Author: Parajuli M
Attributed to:  UKCRIC - (National Research Facility for Infrastructure Sensing) funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1109/mems51670.2022.9699510

Publication URI: http://dx.doi.org/10.1109/mems51670.2022.9699510

Type: Conference/Paper/Proceeding/Abstract