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Low temperature wafer-scale synthesis of hexagonal boron nitride by microwave assisted surface wave plasma chemical vapour deposition (2019)

First Author: Singh R

Attributed to: Future Compound Semiconductor Manufacturing Hub funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1063/1.5091529

Publication URI: http://dx.doi.org/10.1063/1.5091529

Type: Journal Article/Review

Parent Publication: AIP Advances

Issue: 3