Design and development of a compact ion implanter and plasma diagnosis facility based on a 2.45 GHz microwave ion source. (2021)

First Author: Swaroop R

Attributed to: Cockcroft Phase 4 funded by STFC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1063/5.0029629

PubMed Identifier: 34243290

Publication URI: http://europepmc.org/abstract/MED/34243290

Type: Journal Article/Review

Volume: 92

Parent Publication: The Review of scientific instruments

Issue: 5

ISSN: 0034-6748