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Nanoscale wafer patterning using SPM induced local anodic oxidation in InP substrates (2021)

First Author: Ovenden C

Attributed to: Fibre Wavelength Quantum Networks (FQNet) funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/1361-6641/ac3f20

Publication URI: http://dx.doi.org/10.1088/1361-6641/ac3f20

Type: Journal Article/Review

Parent Publication: Semiconductor Science and Technology

Issue: 2