Nanoscale wafer patterning using SPM induced local anodic oxidation in InP substrates (2021)
Attributed to:
'Hetero-print': A holistic approach to transfer-printing for heterogeneous integration in manufacturing
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1088/1361-6641/ac3f20
Publication URI: http://dx.doi.org/10.1088/1361-6641/ac3f20
Type: Journal Article/Review
Parent Publication: Semiconductor Science and Technology
Issue: 2