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Silicon photonic beam steering module with backside coupling elements toward dense heterogeneous integration with drive electronics (2021)

First Author: Chen X

Attributed to: CORNERSTONE: Capability for OptoelectRoNics, mEtamateRialS, nanoTechnOlogy aNd sEnsing funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1063/5.0065210

Publication URI: http://dx.doi.org/10.1063/5.0065210

Type: Journal Article/Review

Parent Publication: APL Photonics

Issue: 11