Modeling of coherence scanning interferometry using classical Fourier optics (2021)
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1117/1.oe.60.10.104106
Publication URI: http://dx.doi.org/10.1117/1.oe.60.10.104106
Type: Journal Article/Review
Parent Publication: Optical Engineering
Issue: 10