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(Invited) Area-selective spatial ALD of SiO2 interleaved with back-etch corrections: Selectivity and surface inspection of non-growth area (2021)

First Author: Mameli A

Attributed to: Exploring All-Solid-State Batteries using First-Principles Modelling: Effective Computational Strategies towards Better Batteries funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1149/ma2021-0121839mtgabs

Publication URI: http://dx.doi.org/10.1149/ma2021-0121839mtgabs

Type: Journal Article/Review

Parent Publication: ECS Meeting Abstracts

Issue: 21