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Deep-Learning-Assisted Focused Ion Beam Nanofabrication (2022)

First Author: Buchnev O

Attributed to: Next Generation Metrology Driven by Nanophotonics funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1021/acs.nanolett.1c04604

PubMed Identifier: 35324209

Publication URI: http://europepmc.org/abstract/MED/35324209

Type: Journal Article/Review

Parent Publication: Nano Letters

Issue: 7

ISSN: 1530-6984