Ge Ion Implanted Photonic Devices and Annealing for Emerging Applications. (2022)
Attributed to:
Silicon Photonics for Future Systems
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.3390/mi13020291
PubMed Identifier: 35208415
Publication URI: http://europepmc.org/abstract/MED/35208415
Type: Journal Article/Review
Volume: 13
Parent Publication: Micromachines
Issue: 2
ISSN: 2072-666X