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Ge Ion Implanted Photonic Devices and Annealing for Emerging Applications. (2022)

First Author: Yu X

Attributed to: Silicon Photonics for Future Systems funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.3390/mi13020291

PubMed Identifier: 35208415

Publication URI: http://europepmc.org/abstract/MED/35208415

Type: Journal Article/Review

Volume: 13

Parent Publication: Micromachines

Issue: 2

ISSN: 2072-666X