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Dielectric breakdown in HfO2 dielectrics: Using multiscale modeling to identify the critical physical processes involved in oxide degradation (2022)

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1063/5.0083189

Publication URI: http://dx.doi.org/10.1063/5.0083189

Type: Journal Article/Review

Parent Publication: Journal of Applied Physics

Issue: 23