Plasma enhanced chemical vapor deposition of p-type Cu2O from metal organic precursors (2022)
Attributed to:
The Physics and Engineering of Oxide Semiconductors for Large-Area CMOS
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1063/5.0089757
Publication URI: http://dx.doi.org/10.1063/5.0089757
Type: Journal Article/Review
Parent Publication: Journal of Applied Physics
Issue: 21