Non-Invasive Millimeter-Wave Profiler for Surface Height Measurement of Photoresist Films (2018)
Attributed to:
Balancing the impact of City Infrastructure Engineering on Natural systems using Robots
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1109/jsen.2018.2806185
Publication URI: http://dx.doi.org/10.1109/jsen.2018.2806185
Type: Journal Article/Review
Parent Publication: IEEE Sensors Journal
Issue: 8