Chemical Mechanical Polishing of Nanocrystalline Diamond
Attributed to:
Nanocrystalline diamond for Micro-Electro-Mechanical Systems (MEMS)
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1007/978-3-030-12469-4_3
Publication URI: http://dx.doi.org/10.1007/978-3-030-12469-4_3
Type: Book Chapter
Book Title: Novel Aspects of Diamond - From Growth to Applications (2019)
Page Reference: 53-89