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Chemical Mechanical Polishing of Nanocrystalline Diamond

First Author: Mandal S

Attributed to: Nanocrystalline diamond for Micro-Electro-Mechanical Systems (MEMS) funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1007/978-3-030-12469-4_3

Publication URI: http://dx.doi.org/10.1007/978-3-030-12469-4_3

Type: Book Chapter

Book Title: Novel Aspects of Diamond - From Growth to Applications (2019)

Page Reference: 53-89