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Anomaly Detection in Batch Manufacturing Processes Using Localized Reconstruction Errors From 1-D Convolutional AutoEncoders (2023)

First Author: Gorman M

Attributed to: Turing AI Fellowship: AI for Intelligent Neurotechnology and Human-Machine Symbiosis funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1109/tsm.2022.3216032

Publication URI: http://dx.doi.org/10.1109/tsm.2022.3216032

Type: Journal Article/Review

Parent Publication: IEEE Transactions on Semiconductor Manufacturing

Issue: 1