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Modelling of a shear-type piezoelectric actuator for AFM-based vibration-assisted nanomachining (2023)

First Author: Xue B

Attributed to: Novel Instrumentation for High-Speed AFM-based Nano Machining funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.ijmecsci.2022.108048

Publication URI: http://dx.doi.org/10.1016/j.ijmecsci.2022.108048

Type: Journal Article/Review

Parent Publication: International Journal of Mechanical Sciences