Ion implantation in silicon for photonic device trimming (2017)

First Author: Milosevic M
Attributed to:  CORNERSTONE: Capability for OptoelectRoNics, mEtamateRialS, nanoTechnOlogy aNd sEnsing funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1109/cleopr.2017.8118916

Publication URI: http://dx.doi.org/10.1109/cleopr.2017.8118916

Type: Conference/Paper/Proceeding/Abstract